Interface A.docx

Interface A.docx

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InterfaceA

IntroductiontotheSEMIEDAStandards

ThisdocumentisanintroductiontotheSEMIEquipmentDataAcquisition（EDAalsoknownasInterfaceA）standards.ItisalsoavailableinPDFformat.Thisdocumentincludethefollowingsections:

∙anoverviewofthestandards,

∙alistofterminologyandacronyms,

∙asummaryofeachmajorEDASEMIstandardincludingE120,E125,E132,E134,and

∙alistofFrequentlyAskedQuestions.

Overview

TheEquipmentDataAcquisition（EDAalsoknownasInterfaceA）StandardsareacollectionofSEMIstandardsforthesemiconductorindustrytoimproveandfacilitatecommunicationbetweenICMaker’sdatagatheringsoftwareapplicationsandthefactoryEquipment.Whenimplementedtogether,thesestandardsprovideaconvenientinterfaceforEquipmentDataAcquisitionusingSOAP/XMLmessagesoveranHTTPorHTTPSconnection.ThemainEDASEMIstandardsincludeE120,E125,E132,andE134.SolutionsmustcomplywiththespecificSOAP/XMLimplementationsofthesestandards;E120.1,E125.1,E132.1,andE134.1.

EDAprovidesmultipleclientaccesstodatagatheringcapabilities.ItdoesnotpurporttoreplacetheSEMIGEM/SECSstandards（E4,E5,E30,andE37）ortheSEMI300mmstandards（E39,E40,E87,E90,E94,andE116）sinceEDAdoesnotprovideanyfeaturesforEquipmentcontrolorconfiguration.Instead,EDAmustbesupportedinadditiontootherrequiredinterfaces.Overtime,EDAcouldreplacetheneedforanyotherdataprovidinginterfacessothatICMakersonlyrequiretheEDAandSECS/GEM/300mmconnectivitystandards.Inpractice,someinitialEDAdeploymentsmayprovidelittlemoredatathantheSECS/GEMinterface,buteventuallyitisexpectedtoprovidemoredata—particularlystateinformation,sensorfeedback,actuatorstates,andotherrawdatanecessaryforprocess,productandequipmentanalysis.AlldatamustbesuppliedtoEDAasdirectlyfromthesourceaspossiblewithminimalsoftwarelayers.Inordertomakeallexpecteddataavailableandachieveperformanceexpectations,someequipmentwillrequireinternalrestructuringandarchitecturalchanges.

During2005and2006ICMakersstartedrequiringintegratedEDAsolutionsfromtheEquipmentSuppliers.ThedemandwillcontinuetoincreaseasICMakersrolloutplanstoimproveyieldandequipmentutilization.EquipmentSuppliersmustbegindevelopmentassoonaspossibleinordertomeetthesedeadlinesandprovideaqualitysolution.

TerminologyandAcronyms

TermorAcronym

Description

3507

IDforE132duringtheTaskForcedevelopmentstage.

3509

IDforE134duringtheTaskForcedevelopmentstage.

AccessControlList（ACL）

PartofE132,theClientAuthorizationdetailsthatgrantordenyClientsessionsandimposerestrictionsonClientsaccesstospecificInterfaceAinformationandoperations.

CEM

E120.1XMLSchemafortheCommonEquipmentModel

ClientAuthentication

InorderforanInterfaceAClienttogatherdata,E132requiresclientstofirstestablishasession.TheclientmustprovidecredentialstotheInterfaceAServer.TheInterfaceAServermustbepreconfiguredtogranttheclientpermission（basedonthecredentials）toestablishasession.

ClientAuthorization

PartofE132,beforetheInterfaceAServeracceptsanoperationrequestfromtheClient,theServermustverifythattheClienthaspermission.ThesepermissionsarepreconfiguredintheServerusingAccessControlLists.

ClientConsumer

AnInterfaceAClientthatreceivestheDataCollectionReportsandotherE134consumeroperations.

ClientManager

AnInterfaceAClientthatestablishesasession,identifiestheConsumertoreceivethedata,setsupDataCollectionPlans,andusesotherE134,E132,andE125manageroperations.

DataCollectionPlan（DCP）

PartofE134,adatagatheringrequestthatincludesasetofEvents（withaconfigurablesetofParameters）,Exceptions（withafixedsetofParameters）,andTraces（withaconfigurablesetofParameters）.AftersuccessfullycreatingaDataCollectionPlan,itmustbeactivated.ThentheClientwillreceivetherespectiveDataCollectionReportsasconfiguredintheplan.

DataCollectionReport（DCR）

TheEquipmentsendstherequesteddatainthisstandardformat.

DCM

E134.1ProvisionalSpecificationforSOAPBindingofDataCollectionManagement

ECA

E132.1ProvisionalSpecificationforSOAPBindingforEquipmentClientAuthenticationandAuthorization

EDA

EquipmentDataAcquisition.ThecombinationofSEMIstandardsE120,E125,E128,E132,E134andE138.Thistermismorecommontheterm“InterfaceA”,butbothrefertothesamething.Ofcourse,theEDAacronymisalsousedinthesemiconductorindustrytostandforElectronicDesignAutomation,butthisisunrelatedtothisdocumentorthereferencedSEMIstandards.

Equipment

EquipmentreferstothehardwareandsoftwarereceivedfromEquipmentSuppliertoperformworkfortheICMaker.InsomecontextofInterfaceA,EquipmentreferstotheInterfaceAServerthatrepresentsthehardwareandsoftwaretotheClients.

ESDS

E125.1ProvisionalSpecificationforSOAPBindingforEquipmentSelfDescription

Exception

PartofE134,anEquipmentalarm,error,orwarningnotification.

Event

PartofE134,anotificationthatsomethingimportantoccurredontheEquipmenttiedtoastatemachine.AnEventrequestinaDCPcanincludeanysetofParameters.

FF

Fire-and-Forgetwhereamessagesenderdoesnotexpectareplymessage.

Host

ThesoftwareanICMakerisrunningtocommunicatewiththeEquipment.AhosttypicallyreferstotheSECS/GEMconnectionbutcouldalsorefertoaclientusingInterfaceA.

HTTP

HyperTextTransferProtocol:

theprotocolformovinghypertextfilesacrosstheInternet.RequiresaHTTPclientprogramononeend,andanHTTPserverprogramontheotherend.HTTPisthemostimportantprotocolusedintheWorldWideWeb（WWW）

HTTPS

HyperTextTransportProtocol（Secure）:

thestandardencryptedcommunicationmechanismontheWorldWideWeb.ThisisactuallyjusttheuseofNetscape'sSecureSocketLayer（SSL）asalayerunderitsregularHTTPapplicationlayering.

InterfaceA

TheresultingEquipmentinterfacewhenSEMIstandardsE120,E125,E132,andE134areimplementedtogether.InterfaceAisalsoknownasEDA.

InterfaceAClient

SoftwarethatattemptstousetheEquipment’sInterfaceAbyestablishingasession.Typically,thisisdevelopedbytheICMakerorathirdpartyhiredbytheICMaker.EquipmentsupplierscanalsodevelopInterfaceAclients,suchasforcapturingdiagnosticinformation.ThisisalsocalledanEDAClient.

InterfaceAServer

TheEquipmentsoftwarethatimplementstheInterfaceAstandards.ThissoftwareshouldbeinstalledontheEquipment’sinternalcomputerandfullyintegratedintotheEquipment’ssystem.However,thesoftwarecanberunonanexternalcomputertoretrofitEquipmentthatdoesnothaveanintegratedsolution.ThisisalsocalledanEDAServerorEDAWebServer.

InterfaceB

AcollectionofSEMIstandardstoimplementdatasharingbetweenapplications（primarilyICMakerapplications）,suchasStatisticalProcessControlandRun-To-Runapplications.

InterfaceC

AcollectionofSEMIstandardstoallowremoteaccesstoEquipmentdata.ThisisintendedprimarilyforEquipmentSupplierstoremoteobtaintheEquipment'sdiagnosticandmaintenanceinformation.

Metadata

Informationthatdescribesthedata,suchaswhenanEventoccursortheinterpretationofaParameter'svalue.

Operation

AnInterfaceAtransaction,method,ormessageinitiatedbyanInterfaceAclientorserver.Eachoperationhasaname,well-definedformatandmeaning.E125,E132,andE134eachdefineasetofoperationsfortheclientandserver.

Parameters

ThesetofdataavailableforgatheringfromtheEquipment'sInterfaceAconnection.

PR8

ProposedStandardfortheEquipmentDataAcquisition:

apreviousnamefortheE134standard.

RR

Request-Responsewhereamessagesenderexpectsareplymessage.

SecurityAdmin

ApartofE132,SecurityAdminisautilityprovidedwiththeInterfaceAServertoprovideadministrativeconfiguration.

Session

AlsocalledanAuthenticatedSession,asessionisestablishedbetweentheServerandClientbyfollowingtheE132procedures.Onceasessionisestablished,theClientcansendauthorizedoperationmessages.

SOAP

SimpleObjectAccessProtocol（SOAP）:

InordertomaketheInterfaceAstandardseasiertoimplement,theyusetheSOAPprotocol.Itisalightweightprotocolforexchangeofinformationinadecentralized,distributedenvironment.ItisanXMLbasedprotocolthatconsistsofthreeparts:

anenvelopethatdefinesaframeworkfordescribingwhatisinamessageandhowtoprocessit,asetofencodingrulesforexpressinginstancesofapplication-defineddatatypes,andaconventionforrepresentingremoteprocedurecallsandresponses.SOAPcanpotentiallybeusedincombinationwithavarietyofotherprotocols;however,theonlybindingsdefinedinthisdocumentdescribehowtouseSOAPincombinationwithHTTPandHTTPExtensionFramework.Seewww.w3.org/TR/2000/NOTE-SOAP-20000508information.

Tool

AsynonymforEquipment.ThetermEquipmentisusedmorefrequentlyinthestandards.

Trace

DatapollingperformedbytheEquipmentasdefinedbytheClient.TheClientdefinesthepollingfrequency,thesetofpolledParameters,andtheconditionstostartandstoppolling.

UML

UnifiedModelingLanguage（UML）:

AlloftheInterfaceAstandardsuseUMLnotationforallclassdiagramsandforobjectorienteddiagramsprovidedasexamples.UMLisanotationforrepresentingobject-orienteddesignsandviewscreatedbyBooch,Rumbaugh,andJacobsoninordertomergetheirthreepopularnotat