5工艺排气技术规范Word文档格式.docx
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TableofContents
1.Statementofwork
Thescopeofworkincludesfollowingsystems
∙Processexhaustairsystemsincl.scrubbers,chemicaldosingsystem,scrubber/ductdrainstothemaindrainsystem,fans,stacksandductwork
∙
∙ElectricalsystemincludingMCC,VFD,UPS/DCBank,cablingetcforExhaustPackage
∙ControlSystemincludingfielddevicesandlocalSCADAforExhaustPackage
Thescopeofworkshallcover
∙Thedetailedengineering(incl.SpacemanagementforFab8)
∙Furnishingofallmaterials,labor,equipment
∙Constructionandinstallation
∙Transportandassembly(incl.seaworthypackaging)
∙Commissioning,testingandacceptance
∙Service
∙Documentation,asbuiltdrawingsandO&
M(inChinese)
∙Qualityassuranceandcontrol
∙ContinuousQualityMonitoring
∙Trainingofownerandownerspersonnel
∙Operation(untilhand-overofthecontrol-system)
AdetailedresponsibilitymatrixisgiveninAttachment1.
ThesystemshallsupplyanexhaustpackageintherequiredquantityandqualitytoFab8.
SMICFabnamingconventionisasfollows:
Fab8
Therequiredcapacities,quantitiesandsystemdesignaredefinedinchapterSystemDescription.Theinstallationshallbesuitableforcontinuousoperation100%oftime.
Allupgradesandextensionsofthesystemshallbepossiblewithoutinterruptionordeteriorationofthesystemoperation.
Thequalitymonitoringsystemshallusehighaccuracyon-lineinstrumentation,automateddataacquisition,out-of-tolerancealertingandalarmingandtrending(seechapterElectrical,ControlsandMonitoringfordetails).Thesystemshallincorporatethebestavailableandcost-effectivetechnologyandbecapableofbeingmodifiedwithminimumimpacttomanufacturinglinesasnewequipmentbecomesavailable.
AllSCADAdatashallbemadeavailabletothecentralFMCSsystem,ifrequiredbytheOwner.
Underthetermcompletesystemsisunderstood,i.e.formpartofthescopeworkoftheContractor:
∙Deliveryandinstallationofallrequiredmaterials,components,auxiliaries,fittings,fastenings,supports
∙Alltemporaryprovisionsincl.allmeansandprovisions(temporaryandpermanent)forvertical/horizontaltransportation
∙Alltemporaryprovisions,siteofficesandrequiredutilitiesforstart-upandcertifications
∙Operation,maintenance,monitoringandreportingetc(limitedforperiodfromcommissioningtofinalacceptance)
Contractorshallalsoinstallallinterconnectingpipingbetweenpartsofthesystem.
Constructionmanagementshallformpartofthescopeofthecontractor.Installationshallbedoneinconditionsasperspecificationsofthisbidpackage.TheContractorshallberesponsibleformaintainingcleanconditionandgoodhousekeepingintheareasandallotherrelevantroomsorareas,wheretheContractorpersonnelworks.
Thecontractorshallbeliablefortheoverallperformancesoftheexhaustpackageaspercontract.Thisshallberepeatedafterlayoutchangesandtheresultingchangesinconsumption,ifrequiredbytheOwner,seechapterProjectControlsandDocumentation.
Allprovisions,utilitiesandlabornecessaryforthesafeandreliableinstallation/operationofthetotalexhaustpackage,suchassiteofficesetc.shallbepartofthescopeoftheContractor,evenifnotspecificallymentioned.
2.
Systemdescription
2.1General
2.2
ProcessexhaustisrequiredtoservemanufacturingandsupporttoolswithintheproductionareasofFab8.
Fourseparateexhaustsystemsaretobeinstalled,namelyscrubbed,ammonia,generalandsolvent.Theexhaustsystemsaretobeseparatedbasedupontheareaserved.Fab8willbeservedwithaseparateexhaustsystemfromFab8.Foradetaileddefinitionofsystemcoverageforthisbidpackage,pleaserefertothedesigndrawings.
Thesesystemsaretobedesignedtomaintainalevelofexhaustatthemostremotepointinthedistributionsystem.Restrictedpollutantscontainedwithintheextractedairaretobetreatedpriortobeingdischargedtotheenvironment.ThepollutioncontrolmeasureistobeconsideredforeachexhaustsystemsandistobecompliantwithlocalcodesinadditiontotherequirementsofSMIC.
Tocrossfirezoneswiththeductworktheexhaustsystemvendormustfollowlocalcodes,FM-regulationsandSMICrequirements.
Drainpointsforcondensateshouldbeinstalledinmainductsinsufficientquantityandateverylowpointintheductwork.Allexhaustcondensatedrainsshallbeconnectedtothemainprocessdrainsystem.
AllprocessdrainsaretogetaconnectiontoscrubbedexhaustsystemtoventvaporfumesfromthePDSdrains.
Thesystemsaretocompriseofmainductandsub-mainducts.Apressuredifferentialtransmitterwillbeinstalledatendofthemostremotemainductforeachexhaustsystemformonitoringpurpose.Twopressuredifferentialtransmitters(connectingtoseparateAIcardsfortrueredundancy)willbeinstalledatsuctionheaderforeachexhaustsystem.TheyareusedforcontrollingtheVFDoutput/fanspeed.
Eachsub-mainshallbeequippedwithapressureindicatorgaugeforvisualpressurecheckattheendofthesub-mainandalockablemanualdamperforairflowcontrol,alsoacappedmeasuringportforairflowspeed/pressure/contentmeasurements.
HangersinthesubfabincludeC-profilesatthewaffleslabandvibrationisolators.Additionalvibration-dampedhangersaretobeinstalledonthesub-mainsinthePhotolithographyArea.
Gratingsateachlevelintheexhaustductshaftbelongtothescopeoftheexhaustsystem,includingremovablemaintenanceopeningonthebottomofthefacetpanelandastepladder.I-beamsupportsattachedtothebuildingsteelstructurefortheexhaustriserductsarepartoftheexhaustsystemscope.
Onepressurerelievedamperwillbeinstalledinthemainheadertopreventtoomuchunderpressureintheductworksystem.Theductshavetobeequippedwithsufficientopeningsformaintenanceofdampersandscrubbersinthemanifoldsetc.
Forductworklayoutandrouting,pleaserefertothedesigndrawings.
Forsafetyreasons150mmC-Profileshavetobeinstalledunderneathmainductsasfall-downprotectionandadditionalsupport(every4.2m).
2.3AcidScrubbedandAmmoniaExhaust
2.4
Theacidscrubbedexhaustsystemisdesignedfortheremovalofaircontainingacidsfromtheprocessequipmentintheproductionarea.Theammoniaexhaustsystemisdesignedfortheremovalofaircontainingammoniafromtheprocessequipmentintheproductionarea.
Independentsystemsshallbeprovidedforscrubbedandammoniaexhaust.Eachsystemshallbeprovidedwithstandbycapacity.
Acid/Ammoniaexhaustsystemscomprisesofthefollowingelements:
∙exhaustfans
∙wetscrubbers
∙distributionductwork
∙mainheadersandmanifolds
∙exhauststacks(FRP)
Thetotalspecifieddesignvolumeofacidcontaminatedairtobeexhaustedisapproximately*****CMH(with*****CMHstandby).Thetotalspecifiedvolumeofammoniacontaminatedairtobeexhaustedisapproximately*****CMH(with*****CMHstandby).
Fiveacidscrubbers/fans(included:
onestandbyscrubber/fan)aretobeinstalledinFab8Level3.Thescrubbersshallbeinstalledtoreducepollutiontolocalauthorityrequirements.Thereisamanifold(mainheader)connectingthescrubbersforeachsystemonthesuctionsideandoneonthedischargeside.
Eachsub-mainistobeequippedwithatestporttoallowmeasurementbyapressure/airspeedtestingprobe(Testo400).Eachsub-mainshallalsobeequippedwithapressureindicatorgaugeforvisualpressurecheckattheendofthesub-mainandamanualdamperforairflowcontrol.
Onepressurerelievedamperwillbeinstalledinthemainheadertoprotecttheductworksystemfromdamageduetotoomuchunderpressure.
ThechemicalsupplysystemswillbeinstalledforthescrubbersonFab8Level3(NaOHforSEXscrubbersandH2SO4forAEXscrubbers).FromtheNaOH/H2SO4storagetanksonFab9Level1(storagetanksandfillingstationsareinthescopeoftheFAB9ProcessExhaustSysteminStage1.Instage2,theNaOHwillcomefromthecommonstoragetankonCUB4Level1andH2SO4willbefromthewasteacidtank.),Thesupplysystemshallincludetwopumpsforeachchemical(magnetic-coupled,plasticlining),doublecontainmentpipingfromcommonchemicalstoragetankstothedailytanks,dailytanksincludingcontrolpanelandallaccessories.Theamountsofthechemicalsusedaretobemonitoredwithvolumeflowmeasuringdevicesandshownontheexhaustsystemcomputermonitor.Thecompleteandfunctionalchemicaldosingsystemsareincludedintheprocessexhaustsystempackage.
Thescrubberblow-downandcondensatedrainswillbeconnectedtomainPDSdrainonFab8Level1(drainspipingincludedinexhaustpackage).ThecondensatedrainsforthemainrisersmustalsobedrainedtodesignatedlocationsonLevel1,thenpumpedtothePDSdrain(SEX)ortheappropriatecollectiontank(AEX).
Theprocessedcleanairwillbedischargedthroughstacks.Theductworksystemincludingstacksmustbeacid/ammonia(chemical)andcorrosionresistant.TheductworkmaterialmustbeFMcertified,ETFE/ECTFE(fluoropolymer)coatedstainlesssteel304.TheductworksysteminFAB8mustbeprovidedwithapneumaticoperatedunderpressureprotectiondamperinstalledonthemainheader,whichcanalsobeusedasby-passdamperformaintenanceandtestingpurpose.Allsub-mainsaretobeequippedwithpressureindicatorsattheendsforvisualpressurecheck.ThescrubbersandstacksaremadeofFRP.Themainheader