探针法测电阻率word版Word文档下载推荐.docx
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对于薄层材料或外延材料选取200g。
7当室温有较大波动时，最好将电阻率折算到23℃时的电阻率。
因为半导体的电阻率对温度很敏感。
如果有必要考虑温度对电阻率的影响，可用下面的公式进行计算
式中ρ参考为修正到某一参考温度（例如23℃）下的样品电阻率;
ρ平均为测试温度下样品的平均电阻率；
CT为温度系数，它随电阻率变化的曲线示于图5；
T为测试温度；
T参考为某一指定的参考温度。
5．附录
附录1A样品厚度修正系数G（
）
样品厚度较薄：
=0.001~1见表5
W：
样品厚度（μm）：
S：
探针间距（mm）
W/S
W
2
3
4
5
6
7
8
9
0.00
0.02
0.03
0.04
0.05
0.06
0.07
0.08
0.09
0.10
0.11
0.12
0.13
0.14
0.15
0.16
0.17
0.18
0.19
0.20
0.21
20
30
40
50
60
70
80
90
110
120
130
140
150
160
170
180
190
200
210
.000
.007
.014
.022
.029
.036
.043
.051
.058
.065
.072
.079
.087
.094
.101
.108
.115
.123
.130
.137
.144
.151
.001
.008
.015
.030
.037
.044
.066
.073
.080
.095
.102
.109
.116
.131
.138
.145
.152
.009
.016
.023
.038
.045
.052
.059
.074
.081
.088
.110
.117
.124
.139
.153
.002
.017
.024
.031
.053
.060
.067
.082
.089
.096
.103
.118
.125
.132
.146
.154
.003
.010
.025
.032
.039
.046
.061
.068
.075
.097
.104
.111
.126
.133
.140
.147
.004
.011
.018
.040
.047
.054
.069
.076
.083
.090
.105
.112
.119
.141
.148
.155
.012
.019
.026
.033
.048
.055
.062
.077
.084
.091
.098
.113
.120
.127
.134
.149
.156
.005
.027
.034
.041
.056
.063
.070
.092
.099
.106
.128
.135
.142
.157
.006
.013
.020
.035
.042
.049
.071
.078
.085
.100
.107
.114
.121
.136
.143
.150
.021
.028
.050
.057
.064
.086
.093
.122
.129
.158
0.22
0.23
220
230
.159
.166
.167
.160
.161
.168
.162
.169
.170
.163
.164
.171
.172
.165
0.24
0.25
0.26
0.27
0.28
0.29
0.30
0.31
0.32
0.33
0.34
0.35
0.36
0.37
0.38
0.39
0.40
0.41
0.42
0.43
0.44
0.45
0.46
0.47
0.48
0.49
240
250
260
270
280
290
300
310
320
330
340
350
360
370
380
390
400
410
420
430
440
450
460
470
480
490
.173
.180
.188
.195
3202
.209
.216
.224
.231
.238
.245
.252
.260
.267
.274
.281
.288
.296
.303
.310
.317
.324
.331
.338
.346
.353
.174
.181
.203
.210
.217
.232
.239
.246
.253
.268
.275
.282
.289
.311
.318
.325
.332
.339
.175
.182
.189
.19
.211
.218
.225
.247
.254
.261
.283
.290
.297
.304
.319
.326
.333
.340
.347
.354
.183
.190
.197
.204
.219
.226
.233
.240
.255
.262
.269
.276
.291
.298
.305
.312
.341
.348
.355
.176
.198
.205
.212
.227
.234
.241
.248
.263
.270
.277
.284
.306
.313
.320
.327
.334
.177
.184
.191
.199
.213
.220
.242
.249
.256
.278
.285
.292
.299
.314
.321
.328
.335
.342
.349
.356
.185
.192
.206
.214
.221
.228
.235
.250
.257
.264
.271
.286
.293
.300
.307
.329
.336
.343
.350
.357
.178
.193
.200
.207
.229
.236
.243
.265
.272
.279
.301
.308
.315
.323
.351
.358
.186
.201
.208
.215
.222
.237
.244
.251
.258
.273
.280
.287
.294
.316
.330
.337
.344
.187
.194
.223
.230
.259
.266
.295
.302
.309
.345
.352
.359
0.50
500
.360
.361
.362
.363
.364
.365
3.68
0.51
0.52
0.53
0.54
0.55
056
0.57
0.58
0.59
0.60
0.61
0.62
0.63
0.64
0.65
0.66
0.67
0.68
0.69
0.70
0.71
0.72
0.73
0.74
0.75
0.76
510
520
530
540
550
560
570
580
590
600
610
620
630
640
650
660
670
680
690
700
710
720
730
740
750
760
.367
.374
.381
.388
.395
.402
.409
.416
.422
.429
.436
.443
.450
.456
.463
.470
.476
.483
.489
.496
.502
.508
.515
.521
.527
.533
.368
.375
.382
.389
.396
.423
.430
.437
.444
.457
.464
.477
.490
.503
.509
.516
.522
.528
.534
.403
.410
.417
.424
.431
.451
.458
.471
.484
.491
.497
.510
.529
.535
.369
.376
.383
.390
.397
.404
.411
.418
.425
.438
.445
.452
.465
.472
.478
.485
.498
.504
.517
.523
.370
.377
.384
.391
.398
.405
.432
.439
.446
.459
.466
.479
.492
.505
.511
.524
.530
.536
.412
.419
.426
.433
.453
.460
.473
.486
.499
.512
.518
524
.537
.371
.378
.385
.392
.399
.406
.413
.420
.427
.440
.447
.454
.467
.474
.480
.487
.493
.500
.506
.519
.525
.531
372
.379
.386
.393
.400
.407
.414
.434
.441
448
454
461.
468
.481
.488
.494
.507
.513
.532
.538
.421
.428
.435
.442
.448
.455
.462
.468
.475
.501
.514
.520
.526
.373
.380
.387
.394
.401
.408
.415
.449
.469
.482
.495
.539
0.77
770
.540
.541
.542
.543
.544
.545
0.78
0.79
0.80
0.81
0.82
0.83
0.84
0.85
0.86
0.87
0.88
0.89
0.90
0.91
0.92
0.93
0.94
0.95
0.96
0.97
0.98
0.99
1.00
780
790
810
820
830
840
850
860
870
880
890
900
910
920
930
940
950
960
970
980
990
1000
.546
.552
.558
.564
.569
.575
.581
.587
.592
.598
.603
.609
.614
.619
.625
.630
.635
.640
.645
.650
.655
.660
.665
.570
.576
.593
.604
.615
.620
.636
..641
.646
.651
.656
.547
.553
.559
.565
.571
.582
.588
.599
.610
.621
.626
631
.641
.661
.577
.583
.594
.605
.616
.631
.637
.642
.647
.652
.657
.548
.554
.560
.572
.589
.600
.611
.622
.627
.632
.662
.
.549
.555
.561
.567
.573
.579
.584
.596
.601
.607
.612
.617
.623
.628
.633
.638
.643
.648
.653
.658
.663
.590
.550
.556
.562
.568
.585
.591
.602
.613
.618
.634
.639
.644
.649
.654
.574
.580
.597
.608
.624
.629
.664
.551
.557
.563
.586
.62
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