传感器研发设计 模拟和数字电路 涡流压电电容传感器 AUTOCAD文档格式.docx

传感器研发设计 模拟和数字电路 涡流压电电容传感器 AUTOCAD文档格式.docx

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mmby30 

mmdevicedoesnotneedaregulatorintheelectricalcircuitandrunscontinuouslyformorethanaweekonacoin-sizedbattery.

Developmentoftemperaturestablechargebasedpiezoelectriccompositequasi-staticpressuresensors 

Inthisworkpiezoelectriccompositechargebasedsensorsaredeveloped,aimedatquasi-staticpressuresensororswitchtypeapplications.Theuseofpiezoelectriccompositematerialsallowsformanufacturingrobustdeviceswhichcaneasilybeintegratedwithconventionalpolymerprocessing.Piezoelectriccompositesofleadzirconatetitanate（PZT）andtwotypesofpolymers,polyamide-6（PA6）andaliquidcrystallinethermosettingpolymer（LCT）wereusedtomanufacturesensordevices.Thebehavioroftheoutputsignalofdifferenttypesofsensorswasstudiedwithfocusonbothtemperaturedependenceoftheoutputsignalandthedriftofthesignalwithtime.ThepropertiesofthePA6basedcompositesanddevicesarehighlytemperaturedependentwhiletheoutputsignalofLCTbasedcompositesanddeviceshasaverylowtemperaturedependenceanddrift,evenoutperformingthePZTreferencedevice.Thetemperaturedependenceoftheoutputsignalofthecompositedevicesisdependentonthedeviceconfigurationaswellasthematerialproperties,suchaspolymerpermittivity.ThedriftofthesignalisstronglydependentontheresistivityofthePZT–polymercompositematerialusedinthesensor.

AnewPZTpiezoelectricsensorforgravimetricapplicationsusingtheresonance-frequencydetection 

SensorsandActuatorsB:

Chemical 

Piezoelectricsensorsmadeofquartz,Pb（Zr,Ti）O3,Pb（La,Zr,Ti）O3,orPb（Zr,Ti,Sn）Oyhaverapidlybeendevelopedrecentlybecauseofthepotentialapplicationsindevicessuchasbiosensors,accelerometers,pressuresensors,andultrasonictransducers.However,thedevelopmentofdeviceswithreducedsizebutwithimprovedsensitivityishighlyimportant.Withthisidea,thestudyaimstodevelopaleadzironatetitanate（PZT）chipasanovelgravimetricbiosensorusingtheresonancefeatureinbiomoleculedetection.ThePZTthinfilmcharacterizedbytheX-raydiffractometer（XRD）hasaperovskitestructure.ThefabricatedPZTsensorwasdesignedwith250 

μm 

×

250 

μm-sensingareasofelectrodes,determinedbythemeasuredimpedanceat98.5 

MHzfrequency.Themorphologyandcross-sectionofscanningelectronmicroscope（SEM）imagesshowthatthethicknessofthespin-onPZTlayerwasabout500 

nmandthecrystalgrainsizewaslessthan50 

nm.Moreover,anevaluationcircuitconsistedofaresonancecircuitandafrequency-to-voltagecircuitwasestablishedtodetectbovineserumalbumin（BSA）protein.ThePZTsensor,combinedwithevaluationcircuit,showedahighsensitivityof62.8 

Hz 

cm2/ng.Thedetectionsensitivitywasenhancedby300foldsthanthatoftraditionalquartzcrystalmicrobalance（QCM）.

Chemical化学传感器开发应用项目实例

Inthisstudy,theregioregularpoly（3-hexylthiophene）（rr-P3HT）basedpiezoelectricsensorsweredevelopedandevaluatedtodetectalcoholicvolatileorganiccompounds（VOCs）associatedwithspoiledandSalmonellatyphimuriumcontaminatedpackagedbeefheadspace.Thedropcoatingtechniquewasusedtodepositthinfilmsofrr-P3HTonbothsidesofquartzcrystalmicrobalance（QCM）electrode.TheQCMpolymersensorswerefoundtoproviderepeatableandreproduciblesensorresponsetoalcoholVOCswithafastrecovery（<

2 

min）atroomtemperature（25 

°

C）.TheprincipalcomponentanalysisonthesensorssensitivitieswasperformedtodiscriminatethesensedalcoholVOCs,namely:

3-methyl-1-butanolfrom1-hexanol.TheQCMpolymersensorsdemonstratedselectiveresponsetolowconcentrationof3-methyl-1-butanol（averageestimatedlowestdetectionlimit（LDL）:

4.35 

ppm）andto1-hexanol（averageestimatedLDL:

3.20 

ppm）.The30daysstoragestudyperformedonQCMsensorsshowedidenticalsensitivityresponsesforsensing3-methyl-1-butanoland1-hexanolatlowconcentrations.

Developmentofpiezoelectricacousticsensorwithfrequencyselectivityforartificialcochlea 

SensorsandActuatorsA:

Physical物理传感器开发样例

Inthispaper,wereportanovelpiezoelectricartificialcochleawhichrealizesbothacoustic/electricconversionandfrequencyselectivitywithoutanexternalenergysupply.Thedevicecomprisesanartificialbasilarmembrane（ABM）whichismadeofa40 

μmthickpolyvinylidinedifluoride（PVDF）membranefixedonasubstratewithatrapezoidalslit.TheABMovertheslit,whichmimicsthebiologicalsystem,isvibratedbyacousticwavesandgenerateselectricoutputduetothepiezoelectriceffectofPVDF.ThewidthofABMislinearlyvariedfrom2.0to4.0 

mmalongthelongitudinaldirectionof30 

mmtochangeitslocalresonantfrequencywithrespecttotheposition.Adetectingelectrodearraywith24-elementsof0.50 

1.0 

mmrectanglesismadeofanaluminumthinfilmonABM,wheretheyarelocatedinacenterlineoflongitudinaldirectionwiththegapsof0.50 

mm.Sincethedevicewillbeimplantedintoacochleafilledwithlymphfluidinfuture,thebasiccharacteristicsintermsofvibrationandacoustic/electricconversionareinvestigatedbothintheairandinthesiliconeoilwhichisamodeloflymphfluid.Theinvitroopticalmeasurementsshowthatthelocalresonantfrequencyofvibrationisvariedalongthelongitudinaldirectionfrom6.6to19.8 

kHzintheairandfrom1.4to4.9 

kHzinthesiliconeoil,respectively.Sincearesonatingplacevibrateswithrelativelylargeamplitude,theelectricoutputtherebecomeshighandthatattheotherelectrodesremainstobelow.Thus,theelectricvoltagesfromeachelectroderealizethefrequencyselectivity.Furthermore,theeffectofsurroundingfluidonthevibrationisdiscussedindetailbycomparingtheexperimentalresultswiththetheoreticalpredictionsobtainedbytheWentzel–Kramers–Brillouinasymptoticmethod.Thetheoreticalpredictionindicatesthatthesurroundingfluidofthehigherdensityinducesthelargereffectivemassforthevibrationthatresultsinlowerresonantfrequency.Fromthesefindings,thefeasibilityofartificialcochleaisconfirmedbothexperimentallyandtheoretically.

DevelopmentofanElectricalCapacitanceTomographysystemusingfourrotatingelectrodes 

Abstract

ThispaperpresentsanElectricalCapacitanceTomography（ECT）sensorschemeconsistingofNsegmentslinkedinfourgroups,treatedassingle,extremelybroadelectrodesforminga4-electrodesensor.Thisconfigurationisrepeatedalongthepipecircumference,selectingdifferentsegmentsinordertoformN/4independent4-electrodeschemes.TheresponseofthissensorisstudiedbymeansofFiniteElementMethod（FEM）-basedsimulations,andtheresultsarecomparedtotheresponseofa12-electrodeconventionalsensor.Theimagereconstructionprovedtohavelowererrorwhenusingthesegmentedsensor,anditislesssensitivetowhitenoiseaffectingthemeasurements.Atomographwith20segmentsbasedonaFPGAcorehasbeendevelopedandtestedusingatestphantom.Resultsshowthathighvaluesofinter-electrodecapacitancesandbetterimagereconstructioncanbeachieved.

Afiniteelementmodelfortheanalysisof3Daxisymmetriclaminatedshellswithpiezoelectricsensorsandactuators 

三维线性理论和有限元模型在传感器功能单元设计分析中的应用CompositeStructures

Thispaperpresentsthedevelopmentofasemi-analyticalaxisymmetricshellfiniteelementmodelwithpiezoelectriclayersusingthe3Dlinearelasticitytheory.Thepiezoelectriceffectofthematerialcouldbeusedassensorsand/oractuatorsinwaytocontrolshelldeformation.Inthepresent3Daxisymmetricmodel,theequationsofmotionareexpressedbyexpandingthedisplacementfieldusingFourierseriesinthecircumferentialdirection.Thus,the3Delasticityequationsofmotionarereducedto2Dequationsinvolvingcircumferentialharmonics.Inthefiniteelementformulationthedependentvariables,electricpotentialandloadingareexpandedintruncatedFourierseries.Specialemphasisisgiventothecouplingbetweensymmetricandanti-symmetrictermsforlaminatedmaterialswithpiezoelectricrings.Numericalresultsobtainedwiththepresentmodelarefoundtobeingoodagreementwithotherfiniteelementsolutions.

Optimizedpiezoelectricsensorforaspecificapplication:

DetectionofLambwaves 

ThisworkisdevotedtothedevelopmentandtheoptimizationofanewpiezoelectricsensorusingLambwavesdestinedtoaerospacestructureshealthmonitoring.Insuchsystems,Lambwavesareusuallyexcitedandreceivedbythinsinglepiezoelectrictransducers.OneofthemostcriticaltasksinhealthmonitoringistoidentifyallthegeneratedLambwavesinordertoeasethedamageestimation.ApossiblesolutionistomeasuretheLambwavesignalatdifferentlocationsalongthepropagationdirection.So,thedevelopmentofadistributedsensingtechnologyusingmetallicmulti-electrodedepositedonapiezoelectricsubstratewasakeyelement,whichbuiltthebridgebetweenthesensorssignalsandthestructuralintegrityinterpretation.

Firstly,thevariousmanufacturestagesofthisnewsensorbythetapecastingtechniquewerereported.Secondly,piezoelec