德国英福康INFICON氦气检漏仪UL1000详细说明.ppt

德国英福康INFICON氦气检漏仪UL1000详细说明.ppt

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LeakDetectorWorkshop,Agenda,DefinitionMethodsofLeakDetectionPrinciplesofLeakDetectorsOverviewofINFICONL.D.Howtoperformaleakcheck,Definition,Whatisaleakrate?

Theleakratestatesthequantityofgaswhichflowsthroughaleakingpointatagivenpressuredifference.Unit:

mbarls-1,Definition,Diameterequalsheliumleakrate（mbarI/s）1.0cm10+41.0mm10+20.1mm1000.01mm10-21.0m10-41.0Angstrom10-12,Definition,PressureRise/RORtest,Q=VP/t,LeakCheck,WhyuseHeliumasatestgas?

ExcellentseparationwithinamassspectrometerfromneighboringmassesOnly5ppmintheair-averylowbackgroundSmallestgasparticleexcepthydrogenInertgas-doesnotreactwithothersubstancesNon-toxic,non-combustible,non-explosivelighterthanair-itaidsleaktesting,asthetestgasmayescapeupwardsinexpensive,Definition,MethodsofLeakDetection,MethodsofLeakDetection,VacuumMethods:

Theequipmenttobetestedisevacuated.

（1）Localleakdetection:

Evacuatedtestsample&Heliumissprayedonfromtheoutside.,TimeConstants,

（2）Integralleakdetection:

Evacuatedtestsample&Testsamplewithinaheliumatmosphere,MethodsofLeakDetection,OverpressureMethod:

Theequipmenttobetestedispressurizedwithasearchgas.

（1）Localleakdetection:

Testsamplecontainshelium,MethodsofLeakDetection,

（2）Integralleakdetection:

Testsamplecontainshelium,testsamplewasinanevacuatedcontainer,MethodsofLeakDetection,WheretoconnectaLeakDetector,MethodsofLeakDetection,PrinciplesofLeakDetector,PrinciplesofLeakDetector,Aheliumleakdetectormeasurestheheliumpartialpressureinthepumplineandconvertsitintoaleakrate.,QHe=PHexSHe,HePumpingSpeed,HePartialPressure,LeakRate,PrinciplesofLeakDetectorSelectiveMassSpectrometer,

（1）magneticfield（perpendiculartoionpath）

（2）positiveions（allmasses）（3）ioncollector（4）amperemeterandamplifier（5）acceleratingvoltage（6）anode（7）electrons（8）heatedfilament（iridium/yttriumcoated）P.S:

hydrogenatoms/ions（redcolor）P.S:

heliumatoms/ions（greencolor）P.S:

heavyatoms/ions（bluecolor）,OverviewofINFICONL.D.,UL1000Fab,UL1000Fab,UL1000FabTechnicalIssues,UL1000FabTechnicalIssues,GrossMode:

V1a,V1b,V2openInletpressure:

15mbarHe-pumpingspeedatinletport:

3.8l/sDetectionlimit:

1x10-7mbarl/s,UL1000FabTechnicalIssues,FineModeV4a,V2openInletpressure:

2mbarHe-pumpingspeedatinletport:

1.5l/sDetectionlimit:

1x10-10mbarl/s,UL1000FabTechnicalIssues,UltraModeV4b,V2openInletpressure:

0,4mbarPumpingspeed:

2.5l/sDetectionlimit:

1x10-12mbarl/s,UL1000FabZEROfunction,1x10-10,1x10-9,1x10-8,1x10-6,1x10-12,1x10-7,1x10-5,1x10-10,1x10-9,1x10-8,1x10-6,1x10-7,1x10-5,1x10-10,1x10-9,1x10-8,1x10-6,1x10-7,1x10-5,1x10-10,1x10-9,1x10-8,1x10-6,1x10-7,1x10-5,1x10-11,1x10-11,GROSS,FINE,ULTRA,UL200/UL500,UL1000Fab,P0.3Torr,ToperformaLeakCheck,準備測漏,1米長的25KF軟管25/40KF,25/16KF轉接頭25KFcenterring,clamp,40KFcenterring,clamp,16KFcenterring,clamp25KFblank氦氣及噴槍電源延長線大型真空包裝袋小型真空包裝袋真空矽膠或真空黏土IPA或酒精裝DIwater之小容器（小杯子）擦拭布測漏儀外接式標準漏或微漏件或乾淨之細髮,調整氦氣流量,DIWater,連接測漏儀,量測反應時間,開始測漏,開始測漏,不恰當的測漏法,End,