TS6700测试仪资料.docx

TS6700测试仪资料.docx

《TS6700测试仪资料.docx》由会员分享，可在线阅读，更多相关《TS6700测试仪资料.docx（107页珍藏版）》请在冰点文库上搜索。

TS6700测试仪资料

TableofContents

CHAPTER1SystemStructure

1.1HardwareConfiguration………………………………………………………3

1.2FeaturesoftheTestSystem……………………………………………….3

1.3MainframeandTestHead…………………………………………………….4

1.4DCMeasurementFunctions…………………………………………………..7

CHAPTER2LoadBoardStructure

2.1PerformanceBoardType……………………………………………………..9

2.2LoadBoardOverview………………………………………………………….9

2.3PinLocation………………………………………………………………….10

2.4LoadBoardLayout……………………………………………………………13

LCDpin,I/Opin,DCpin,UVIpin,HCLKpin

2.5PinAssignmentTable……………………………………………………….17

CHAPTER3SystemFileStructure

3.1SoftwareSystem………………………………………………………………22

3.2DevelopmentandOperatingEnvironment…………………………………23

3.3IntegratedEnvironment…………………………………………………….24

3.4DirectoryStructureofEWS……………………………………………….25

3.5DirectoryStructure（IntegratedEnvironment）……………………….26

3.6FileManagementforTestProgram……………………………………….27

3.7SoftwareProgramArchitecture……………………………………………31

MainProgram,TestFlow,Segment,SampleProgram

CHAPTER4TestResultInspection

4.1DataLog……………………………………………………………………….35

4.2LotSummary……………………………………………………………………36

4.3TestResult…………………………………………………………………..39

4.4Statisticaldata…………………………………………………………….42

4.5WaferSummary…………………………………………………………………45

4.6WaferMap………………………………………………………………………48

4.7DialogBox…………………………………………………………………….51

CHAPTER5CommandReference

5.1DatasetCommands.………………………………………………………….52

5.2SystemManagementCommands………………………………………………52

5.3Pattern/FailDisplayCommands…………………………………………..52

5.4ProgramControlCommands…………………………………………………53

5.5DebuggingCommands…………………………………………………………53

CHAPTER6PatternTool

6.1Howtousethepatterntool（Ver2.2x）……………………………….54

6.2Howtousethepatterntool（Classic）…………………………………56

6.3Howtogetthefailpatterntodatalogfile…………………………57

CHAPTER7ShmooTool

7.1Howtouseshmootool………………………………………………………58

CHAPTER8ModuleMonitor

8.1Howtousethemodulemonitor……………………………………………61

Chapter1SystemStructure

1.1HardwareConfiguration

ThissectionexplainsthehardwareconfigurationoftheTS6700testsystem.

BasicSystemConfiguration

ThebasicconfigurationoftheTS6700testsystemwithonetestheadisshownbelow.Thetestsystemconsistsofthemainframe,testhead,testheadpowerframe,andeithertheWOTorOCTformass-productionoperations.Ifthetestsystemistobeusedfordevelopmentpurposes,anEWSwillberequired.Eachcomponentunitofthetestsystemcontainsdifferenthardwareasshownintherightblockdiagram.

1.2FeaturesoftheTestSystem

ThissectionexplainsmainfeaturesoftheTS6700testsystem.

DigitalPin（I/OPin）

TS6700employsaper-pinarchitecture,whichprovidesatiminggeneratorandDCmeasurementunitoneverydigitalpin（I/Opin）.Thisimprovesflexibilityintestplanningandreducespro-gramdevelopmenttimedrastically.

LCDPin

AcomparatorisprovidedoneveryLCDpin,resultingindrasticreductionoffunctionaltest’stime,comparedtoconventionalcomparatorswitchingtypetestsystems.Inaddition,useofanactiveloadonLCDpinscanalsoreducetesttimeforopen-/short-circuittestsandresistancemeasurementperformedfordeviceshavingmanypins.

InthecaseofTFTdrivers,high-accuracysingle-rangemeasurementscanbeperformedfordeviceswithuptomediumvoltagelevel.

Thetestsystemcanaccommodateupto736LCDpins,allowingthetestsystemtobeusedforfutureLCDdrivershavingalargepincount.

Multi-DUTMeasurement

TS6700allowsuptotwodevicestobemeasuredsimultaneouslypertesthead.

Frequency/TimeMeasurement

Thisfunctionallowsmeasurementofthefrequencyofanydigitalpinandmeasurementoftimedifferencebetweenanydigitalpins.Withthereciprocaltypecounter,high-accuracymeasurementispossibleirrespectiveofthefrequency.Forfrequencymeasurement,ahysteresisforthethresholdvoltagecanbeset.LPF（100kHz）canalsobeselected.

1.3Mainframe,TestHead

ThissectionexplainsthemainframeandtestheadofTS6700system.

A.Mainframe

QTCnest（testercontroller）

AccommodatesCPUcards,harddiskunit,modulecontrollerandinterfacecards.

PGnest

Accommodatesapatterngenerator,rategenerator,failmemorycontrollerandtriggercards.

PMnest

Accommodatespatternmemorycards（onepatternmemorycardper16pins）.Italsoaccommodatesinterfacecardsandserialpatternmemorycards

PMUnest

Accommodatesamaximumof16VImodules（maximumvoltage:

±32V,maximumcurrent:

±31mA）.VImodulesincludePMU,LCDPMUandRVI.

UVInest

Accommodatesamaximumof4universalVImodules（maximumvoltage:

±128V,maximumcurrent:

±1A）.

MSnest

Accommodatesclockgenerator,waveformgenerator,waveformdigitizer,digitalsignalprocessorandothercards.

UPS

AnUninterruptedPowerSupplyisprovidedattherearsideofthemainframetobackupthetestercontrollerincaseofpowerfailure.

Systempower

Accommodatespowersuppliesrequiredforthetestsystem.

B.TestHead

Pinelectronicscardsection

Eachpinelectronicscardaccommodates8pins,andupto14pinelectronicscards（i.e.,112pins）canbeinstalledinatesthead.Theycanbeinstalledincardslots1to7and17to23（cardslots8to16arenotprovided）.Therefore,pins1to56and129to184canbeprovided（pins57to128arenotprovided）.Relationshipbetweenpinelectroniccard#andpin#isshownbelow.

HCLKcardsection

EachHCLKcardaccommodates2pins,andupto2HCLKcards（i.e.,4pins）canbeinstalledinatesthead.Intestprograms,HCLKpinsaretreatedasPINmodules.Thus,pin#57,58,185and186areassignedtotheHCLKpins.RelationshipbetweenHCLKcard#andpin#isshownbelow.

Mininest

Thefollowingcardsareinstalledinthemininest.

1.ITFMcard:

Interfacesthetestercontrollerwithtestheads.ThiscardcanaccommodateanSTM（fortimemeasurement）.

2.LCDIFMcard:

ControlsLCDcards.

3.LCDCKMcard:

SuppliesthesystemclocktoPEcardsandLCDcards.

4.LCDIFAcard:

ReceivessignalsfromLCDcardsandoutputsthemthroughamultiplexertotheMSnest.ItalsosuppliestheoffsetvoltagetotherangingsectionofLCDcards.

LCDcardsection

EachLCDcardaccommodates16pins,andupto46LCDcards（i.e.,736pins）canbeinstalledinatesthead.TheycanbeinstalledinLCDcardslots1to23and25to47（LCDcardslot24isnotprovided）.Therefore,pins1to368and385to752canbeprovided（pins369to384arenotprovided）.

RelationshipbetweenLCDcard#andpin#isshownright.

IDDQcardsection

EachIDDQcardaccommodates2pins,andupto2IDDQcards（i.e.,4pins）canbeinstalledin

atesthead.RelationshipbetweenIDDQcard#andpin#isshownbelow.

IfnoIDDQcardsareinstalled,aPFcardwillbeinstalledinsteadtomonitornestpower.

DCcardsection

EachDCcardaccommodates12pins,andupto2DCcards（i.e.,24pins）canbeinstalledinatesthead.RelationshipbetweenDCcard#andpin#isshownbelow.

Switchbox

TheswitchboxhasswitchesandanindicatingLEDinthefollowingfunctions:

aswitchusedtofixaperformanceboardtothetesthead,aswitchusedtoreleasetheperformanceboard,aswitchusedtoturnSApowerON/OFF,andanLEDusedtoindicatethatpoweriscurrentlysuppliedtothetesthead.Thepositionoftheswitchboxcanbechangedaccordingtohowit'sused（e.g.,wafertest,finaltest）.

1.4DCMeasurementFunctions

A.UVI（UniversalVI）Module

UVImodulesareprovidedasdevicepowersupplies,andcanalsobeconnectedviatheDCmatrixlinetoperformDCparametricmeasurementsthatexceedcurrentrangesofPMU,LCDPMU,andRVI.Inaddition,UVImodulesprovideafunctionofIDDQtest.OutputsoftheUVImodulesareconnectedtoIDDQcardsasshowninthetable.Theoutputvoltagerangeisfrom+128Vto-128V.Theoutputcurrentrangesare30uA,300uA,3mA,30mA,60mA,250mA,1A.WhenconnectedviatheDCmatrixline,themaximumoutputvoltage/currentwillbelimitedto64V/250mA.

B.I/OPinSharedPMU

PMUmodulesareprovidedforDCparametricmeasurementsthatexceedvoltage/current

rangesofSVI.AspecificchannelisassignedtoeachI/Opinasshowninthetablebelow.Theoutputvoltagerangeisfrom+15Vto–15V.Theoutputcurrentrangesare3uA,30uA,300uA,3mA,and30mA.

C.LCDPMU

LCDPMUmodulesareprovidedforDCparametricmeasurementsofLCDpins.AspecificchannelisassignedtoeachLCDpinasshowninthetablebelow.Theoutputvoltagerangeisfrom+32Vto–32V.Theoutputcurrentrangeare3uA,30uA,300uA,3mA,and30mA.

D.I/OPer-PinDC（SVI）

Thisfunctionisprovidedper-pinonthepinelectronicscard,andismainlyusedformeasurementofdeviceinputleakcurrentandshort-circuitcontacttest.VFIMandIFVMmeasurementscanbeperformed.Theoutputvoltagerangeisfrom+8Vto-2.5V.Theoutputcurrentrangesare10uAand250uA.

E.RVI

RVImodulesareprovidedtosupplythereferencepowertotheLCDdrivers,andupto24channelscanbeinstalled.Theoutputvoltagerangeisfrom+32Vto–32V.Theoutputcurrentrangesare3uA,30uA,300uA,3mA,and30mA.

F.DCMeasurementBlockDiagram

Chapter2LoadboardStructure

2.1PerformanceBoardType

A.PerformanceboardcompatiblewithTS6700seriesprobecards

（PFB-AorPFB-D）

ProbecardsdevelopedforTS700canbeusedwithTS6700withoutanymodifications.

LCDpins:

512（max.）,I/Opins:

62（max.）

B.Full-pinperformanceboard（PFB-B）

ThisboardsupportsfullpinconfigurationofTS6700.

LCDpins:

480（max.）,I/Opins:

64（max.）

C.Full-pinperformanceboard（PFB-C）

ThisboardsupportsfullpinconfigurationofTS6700